New Endoscopic Imaging Technology Based on MEMS Sensors and Actuators

نویسندگان

  • Zhen Qiu
  • Shih-Chi Chen
  • Wei-Chuan Shih
چکیده

Over the last decade, optical fiber-based forms of microscopy and endoscopy have extended the realm of applicability for many imaging modalities. Optical fiber-based imaging modalities permit the use of remote illumination sources and enable flexible forms supporting the creation of portable and hand-held imaging instrumentations to interrogate within hollow tissue cavities. A common challenge in the development of such devices is the design and integration of miniaturized optical and mechanical components. Until recently, microelectromechanical systems (MEMS) sensors and actuators have been playing a key role in shaping the miniaturization of these components. This is due to the precision mechanics of MEMS, microfabrication techniques, and optical functionality enabling a wide variety of movable and tunable mirrors, lenses, filters, and other optical structures. Many promising results from MEMS based optical fiber endoscopy have demonstrated great potentials for clinical translation. In this article, reviews of MEMS sensors and actuators for various fiber-optical endoscopy such as fluorescence, optical coherence tomography, confocal, photo-acoustic, and two-photon imaging modalities will be discussed. This advanced MEMS based optical fiber endoscopy can provide cellular and molecular features with deep tissue penetration enabling guided resections and early cancer assessment to better treatment outcomes.

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Distributed MEMS: New Challenges for Computation

12 1070-9924/97/$10.00 © 1997 IEEE IEEE COMPUTATIONAL SCIENCE & ENGINEERING Microelectromechanical systems, often abbreviated as MEMS, are an emerging set of technologies that make it possible to miniaturize and mass-produce large numbers of integrated sensors, actuators, and computers. By merging sensing and actuation with computation and communication, MEMS devices can be distributed througho...

متن کامل

Design and Simulation of a Fluidic Micro-Bio-Sensor Based on Resonator Array

In this paper, a fluidic biosensor with possibility to fabricate by Micro-Electro-Mechanical Systems (MEMS) technology is proposed for biomedical mass detection and lab-on-chip applications. This is designed by electromechanical coupling of harmonic micromechanical resonators with harmonic springers as a mechanical resonator array. It can disperse mechanical wave along the array by electrostati...

متن کامل

Micro Fabrication Technology of Ferroelectric Film and its Application to MEMS

Technological problems for realization of Micro Electro-mechanical System (MEMS) are discussed and an introduction of smart materials (PZT) is encouraged. The film formation and micromachining technology are discussed in integration of PZT thin films into MEMS. Further developments are proposed on PZT micro sensors and actuators with special emphasis laid on exploration of new application field...

متن کامل

Simulation of a Microgripper with Electrothermal Actuator Using COMSOL Software Based on the Finite Element Method

Micro-electro-mechanical systems (MEMs) are Combination of electrical and mechanical components in Micron dimensions. In recent years, holding, actuating methods and handling of MEMs components such as microgripper, microsensors and etc. have been deeply studied. Microgrippers for handling, positioning and assembling of micro components are very useful so that for clamping need actuation create...

متن کامل

Accurate Model of Capacitance for MEMS Sensors using Corrugated Diaphragm with Residual Stress

In this paper we present a new model for calculating the capacitance of MEMS sensor with corrugated diaphragm. In this work the effect of residual stress is considered on deflection of diaphragm and capacitance of sensor. First, a new analytical analyzes have been carried out to derive mathematic expressions for central deflection of corrugated diaphragm and its relationship with residual stres...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

عنوان ژورنال:

دوره   شماره 

صفحات  -

تاریخ انتشار 2017